TY  - BOOK
AU  - Van den Hove, Luc, ed.
TI  - Optical Microlithography XII
T2  - Proceedings of SPIE; V. 3679
SN  - 9780819431530 (Print)
PY  - 1999///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3679
ER  -