@book{29864,
	author = {Van den Hove, Luc, ed.},
	title = {Optical Microlithography XII},
	publisher = {SPIE},
	year = {1999},
	series = {Proceedings of SPIE; V. 3679},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3679}
}