TY  - BOOK
AU  - Fuller, Gene, ed.
TI  - Optical Microlithography X
T2  - Proceedings of SPIE; V. 3051
SN  - 9780819424655 (Print)
PY  - 1997///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3051
ER  -