TY  - BOOK
AU  - Fuller, Gene, ed.
TI  - Optical Microlithography IX
T2  - Proceedings of SPIE; V. 2726
SN  - 9780819421029 (Print)
PY  - 1996///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2726
ER  -