00489nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002200092245004100114260003200155300002000187490003300207856010300240IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819421029 (Print)  cIIA Library  aFuller, Gene, ed. 0aOptical Microlithography IXh[eBook]  aWashington, USAbSPIEc1996  aOnline resource  aProceedings of SPIE; V. 2726  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/2726yClick Here to Access eBook