@book{29859,
	author = {Fuller, Gene, ed.},
	title = {Optical Microlithography IX},
	publisher = {SPIE},
	year = {1996},
	series = {Proceedings of SPIE; V. 2726},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2726}
}