TY  - BOOK
AU  - Stover, Harry, ed.
TI  - Optical Microlithography IV
T2  - Proceedings of SPIE; V. 0538
SN  - 9780892525737 (Print)
PY  - 1985///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0538
ER  -