00752nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003000092245007400122260003200196300002000228490003300248856010300281942000700384999001700391952016200408IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892525058 (Print)  cIIA Library  aStover, Harry, ed.946438 0aOptical Microlithography III: Technology for the Next Decadeh[eBook]  aWashington, USAbSPIEc1984  aOnline resource  aProceedings of SPIE; V. 0470  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0470yClick Here to Access eBook  cEB  c29857d29857  00104070aBANbBANd2011-07-01eSPIEhV. 470l0pEB9317r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0470w2021-11-05yEB