TY  - BOOK
AU  - Stover, Harry, ed.
TI  - Optical Microlithography III: Technology for the Next Decade
T2  - Proceedings of SPIE; V. 0470
SN  - 9780892525058 (Print)
PY  - 1984///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0470
ER  -