@book{29857,
	author = {Stover, Harry, ed.},
	title = {Optical Microlithography III: Technology for the Next Decade},
	publisher = {SPIE},
	year = {1984},
	series = {Proceedings of SPIE; V. 0470},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0470}
}