TY  - BOOK
AU  - Stover, Harry, ed.
TI  - Optical Microlithography II: Technology for the 1980s
T2  - Proceedings of SPIE; V. 0394
SN  - 9780892524297 (Print)
PY  - 1983///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0394
ER  -