00516nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002300092245006700115260003200182300002000214490003300234856010300267IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892524297 (Print)  cIIA Library  aStover, Harry, ed. 0aOptical Microlithography II: Technology for the 1980sh[eBook]  aWashington, USAbSPIEc1983  aOnline resource  aProceedings of SPIE; V. 0394  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0394yClick Here to Access eBook