00748nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003000092245007000122260003200192300002000224490003300244856010300277942000700380999001700387952016200404IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892523696 (Print)  cIIA Library  aStover, Harry, ed.946436 0aOptical Microlithography I: Technology for the Mid-1980sh[eBook]  aWashington, USAbSPIEc1982  aOnline resource  aProceedings of SPIE; V. 0334  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0334yClick Here to Access eBook  cEB  c29855d29855  00104070aBANbBANd2011-07-01eSPIEhV. 334l0pEB9315r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0334w2021-11-05yEB