@book{29855,
	author = {Stover, Harry, ed.},
	title = {Optical Microlithography I: Technology for the Mid-1980s},
	publisher = {SPIE},
	year = {1982},
	series = {Proceedings of SPIE; V. 0334},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0334}
}