TY  - BOOK
AU  - Lacombat, Michel, ed.
TI  - Optical Microlithography and Metrology for Microcircuit Fabrication
T2  - Proceedings of SPIE; V. 1138
SN  - 9780819401748 (Print)
PY  - 1989///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1138
ER  -