TY  - BOOK
AU  - Stover, Harry, ed.
TI  - Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection
T2  - Proceedings of SPIE; V. 0811
SN  - 9780892528462 (Print)
PY  - 1987///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0811
ER  -