Stover, Harry, ed. <br/><br/>
Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection  [eBook] 

 - Washington, USA  SPIE  1987 
 - Online resource 
 - Proceedings of SPIE; V. 0811 .
<br/><br/><label>ISBN: </label>9780892528462 (Print)