@book{29853,
	author = {Stover, Harry, ed.},
	title = {Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection},
	publisher = {SPIE},
	year = {1987},
	series = {Proceedings of SPIE; V. 0811},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0811}
}