00546nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002900119245005000148260003200198300002000230490003400250856010400284IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510618824 (Print)  a9781510618831 (Online)  cIIA Library  aGorecki, Christophe, ed. 0aOptical Micro- and Nanometrology VIIh[eBook]  aWashington, USAbSPIEc2018  aOnline resource  aProceedings of SPIE; V. 10678  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10678yClick Here to Access eBook