Gorecki, Christophe, ed. <br/><br/>
Optical Micro- and Nanometrology VII  [eBook] 

 - Washington, USA  SPIE  2018 
 - Online resource 
 - Proceedings of SPIE; V. 10678 .
<br/><br/><label>ISBN: </label>9781510618824 (Print) 9781510618831 (Online)