TY  - BOOK
AU  - Gorecki, Christophe, ed.
TI  - Optical Micro- and Nanometrology VI
T2  - Proceedings of SPIE; V. 9890
SN  - 9781510601352 (Print)
PY  - 2016///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9890
ER  -