TY  - BOOK
AU  - Gorecki, Christophe, ed.
TI  - Optical Micro- and Nanometrology V
T2  - Proceedings of SPIE; V. 9132
SN  - 9781628410808 (Print)
PY  - 2014///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9132
ER  -