@book{29848,
	author = {Gorecki, Christophe, ed.},
	title = {Optical Micro- and Nanometrology in Microsystems Technology II},
	publisher = {SPIE},
	year = {2008},
	series = {Proceedings of SPIE; V. 6995},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6995}
}