TY  - BOOK
AU  - Gorecki, Christophe, ed.
TI  - Optical Micro- and Nanometrology in Microsystems Technology
T2  - Proceedings of SPIE; V. 6188
SN  - 9780819462442 (Print)
PY  - 2006///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6188
ER  -