00528nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002900092245007300121260003200194300002000226490003300246856010300279IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819462442 (Print)  cIIA Library  aGorecki, Christophe, ed. 0aOptical Micro- and Nanometrology in Microsystems Technologyh[eBook]  aWashington, USAbSPIEc2006  aOnline resource  aProceedings of SPIE; V. 6188  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6188yClick Here to Access eBook