Gorecki, Christophe, ed. <br/><br/>
Optical Micro- and Nanometrology in Microsystems Technology  [eBook] 

 - Washington, USA  SPIE  2006 
 - Online resource 
 - Proceedings of SPIE; V. 6188 .
<br/><br/><label>ISBN: </label>9780819462442 (Print)