@book{29846,
	author = {Gorecki, Christophe, ed.},
	title = {Optical Micro- and Nanometrology in Manufacturing Technology},
	publisher = {SPIE},
	year = {2004},
	series = {Proceedings of SPIE; V. 5458},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5458}
}