TY  - BOOK
AU  - Al-Jumaily, Ghanim, ed.
TI  - Optical Metrology: A Critical Review
T2  - Proceedings of SPIE; V. 10294
SN  - 9781510610521 (Online)
PY  - 1999///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10294
ER  -