00507nam a2200145Ia 4500003000900000008004100009020002700050040001600077100002800093245005000121260003200171300002000203490003400223856010400257IN-BaIIA211028s9999 xx s 000 0 eng d a9781510610521 (Online) cIIA Library aAl-Jumaily, Ghanim, ed. 0aOptical Metrology: A Critical Reviewh[eBook] aWashington, USAbSPIEc1999 aOnline resource aProceedings of SPIE; V. 10294 uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10294yClick Here to Access eBook