00778nam a2200181Ia 4500003000900000008004100009020002600050040001600076100002700092245010200119260003200221300002000253490003300273856010300306942000700409999001700416952016300433IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819441638 (Print)  cIIA Library  aDuparré, Angela, ed. 0aOptical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries IIh[eBook]  aWashington, USAbSPIEc2001  aOnline resource  aProceedings of SPIE; V. 4449  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4449yClick Here to Access eBook  cEB  c29843d29843  00104070aBANbBANd2011-07-01eSPIEhV. 4449l0pEB9303r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4449w2021-11-05yEB