TY  - BOOK
AU  - Duparré, Angela, ed.
TI  - Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II
T2  - Proceedings of SPIE; V. 4449
SN  - 9780819441638 (Print)
PY  - 2001///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4449
ER  -