@book{29843,
	author = {Duparré, Angela, ed.},
	title = {Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II},
	publisher = {SPIE},
	year = {2001},
	series = {Proceedings of SPIE; V. 4449},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4449}
}