00553nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002800092245009900120260003200219300002000251490003300271856010300304IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819437440 (Print)  cIIA Library  aAl-Jumaily, Ghanim, ed. 0aOptical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industriesh[eBook]  aWashington, USAbSPIEc2000  aOnline resource  aProceedings of SPIE; V. 4099  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4099yClick Here to Access eBook