Al-Jumaily, Ghanim, ed. <br/><br/>
Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries  [eBook] 

 - Washington, USA  SPIE  2000 
 - Online resource 
 - Proceedings of SPIE; V. 4099 .
<br/><br/><label>ISBN: </label>9780819437440 (Print)