@book{29842,
	author = {Al-Jumaily, Ghanim, ed.},
	title = {Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries},
	publisher = {SPIE},
	year = {2000},
	series = {Proceedings of SPIE; V. 4099},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4099}
}