Han, Sen, ed. <br/><br/>
Optical Metrology and Inspection for Industrial Applications VI  [eBook] 

 - Washington, USA  SPIE  2020 
 - Online resource 
 - Proceedings of SPIE; V. 11189 .
<br/><br/><label>ISBN: </label>9781510630956 (Print) 9781510630963 (Online)