@book{29839,
	author = {Han, Sen, ed.},
	title = {Optical Metrology and Inspection for Industrial Applications VI},
	publisher = {SPIE},
	year = {2020},
	series = {Proceedings of SPIE; V. 11189},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11189}
}