@book{29838,
	author = {Han, Sen, ed.},
	title = {Optical Metrology and Inspection for Industrial Applications V},
	publisher = {SPIE},
	year = {2018},
	series = {Proceedings of SPIE; V. 10819},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10819}
}