TY  - BOOK
AU  - Han, Sen, ed.
TI  - Optical Metrology and Inspection for Industrial Applications IV
T2  - Proceedings of SPIE; V. 10023
SN  - 9781510604650 (Print)
PY  - 2016///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10023
ER  -