Han, Sen, ed. <br/><br/>
Optical Metrology and Inspection for Industrial Applications IV  [eBook] 

 - Washington, USA  SPIE  2016 
 - Online resource 
 - Proceedings of SPIE; V. 10023 .
<br/><br/><label>ISBN: </label>9781510604650 (Print) 9781510604667 (Online)