00522nam a2200145Ia 4500003000900000008004100009020002600050040001600076100001800092245007800110260003200188300002000220490003300240856010300273IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781628413496 (Print)  cIIA Library  aHan, Sen, ed. 0aOptical Metrology and Inspection for Industrial Applications IIIh[eBook]  aWashington, USAbSPIEc2014  aOnline resource  aProceedings of SPIE; V. 9276  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9276yClick Here to Access eBook