TY  - BOOK
AU  - Harding, Kevin, ed.
TI  - Optical Metrology and Inspection for Industrial Applications II
T2  - Proceedings of SPIE; V. 8563
SN  - 9780819493187 (Print)
PY  - 2013///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8563
ER  -