@book{29835,
	author = {Harding, Kevin, ed.},
	title = {Optical Metrology and Inspection for Industrial Applications II},
	publisher = {SPIE},
	year = {2013},
	series = {Proceedings of SPIE; V. 8563},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8563}
}