00524nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002400092245007400116260003200190300002000222490003300242856010300275IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819483850 (Print)  cIIA Library  aHarding, Kevin, ed. 0aOptical Metrology and Inspection for Industrial Applicationsh[eBook]  aWashington, USAbSPIEc2010  aOnline resource  aProceedings of SPIE; V. 7855  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7855yClick Here to Access eBook