00725nam a2200181Ia 4500003000900000008004100009020002600050040001600076100002800092245004800120260003200168300002000200490003300220856010300253942000700356999001700363952016300380IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819447104 (Print)  cIIA Library  aYimo, Zhang, ed.946349 0aOptical Manufacturing Technologiesh[eBook]  aWashington, USAbSPIEc2002  aOnline resource  aProceedings of SPIE; V. 4921  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4921yClick Here to Access eBook  cEB  c29721d29721  00104070aBANbBANd2011-07-01eSPIEhV. 4921l0pEB9181r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4921w2021-11-05yEB