00512nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002900092245005700121260003200178300002000210490003300230856010300263IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819425188 (Print)  cIIA Library  aGorecki, Christophe, ed. 0aOptical Inspection and Micromeasurements IIh[eBook]  aWashington, USAbSPIEc1997  aOnline resource  aProceedings of SPIE; V. 3098  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3098yClick Here to Access eBook