TY - BOOK AU - Gorecki, Christophe, ed. TI - Optical Inspection and Micromeasurements T2 - Proceedings of SPIE; V. 2782 SN - 9780819421685 (Print) PY - 1996/// CY - Washington, USA PB - SPIE UR - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2782 ER -