TY - BOOK AU - Huang, Peisen, ed. TI - Optical Inspection and Metrology for Non-Optics Industries T2 - Proceedings of SPIE; V. 7432 SN - 9780819477224 (Print) PY - 2009/// CY - Washington, USA PB - SPIE UR - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7432 ER -