00521nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002300092245007200115260003200187300002000219490003300239856010300272IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819477224 (Print)  cIIA Library  aHuang, Peisen, ed. 0aOptical Inspection and Metrology for Non-Optics Industriesh[eBook]  aWashington, USAbSPIEc2009  aOnline resource  aProceedings of SPIE; V. 7432  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7432yClick Here to Access eBook