00560nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002300092245011100115260003200226300002000258490003300278856010300311IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819422750 (Print)  cIIA Library  aDeBusk, Damon, ed. 0aOptical Characterization Techniques for High-Performance Microelectronic Device Manufacturing IIIh[eBook]  aWashington, USAbSPIEc1996  aOnline resource  aProceedings of SPIE; V. 2877  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/2877yClick Here to Access eBook